mmW Station - Manual, 150mm

Item

Specifications

Item

Specifications

• CCD Camera

• High Resolution Camera (HD, Digital)

• Monitor included (Check the sample)

• Observable through monitor

• Option : Camera resolution 

• Microscope 

• 15~380x, zoom control (20" monitor)

• Zoom : 0.75x ~ 7x

• Option : Zoom scope resolution

• Scope X,Y Stage

• X, Y axis travel range: ±5 mm (fine)

• coarse travel range: 150 mm

• Z(Focus): ±15 mm

• Illuminator 

• For scope

• Spot & ring light

• Light attached to the scope in order to observe the sample

• Dimension 

• Weight: Approx. 65 kg

• Table included: Approx. 265 kg

• Size(mm): 900(w) x 900(d) x 800(h)

• Chuck  

• Size: 6"(150 mm)/wafer chuck -   circle

• Clamp: Vacuum (10 mm~150 mm)

• Material: Al(NI)

• Tilt(Theta angle): 7°

• option : package chuck

• Chuck X,Y Stage 

• X, Y axis travel range: ±75 mm

• Resolution: ±3 μm

• Y coarse rail travel range: 200 mm

• Vacuum Switch  

• For holding sample in place

- Chuck vacuum on/off

•  mmW Positioner  
  

• X, Y, Z travel range : 10 mm x 10 mm x 10 mm

• Resolution: 1 μm

• Compatible Inst.: Keysight, Anritsu, Rohde

• Z-Lever

• Platen Z: 5 mm rough adjust, knob up/down

• 5 mm fine adjustable

• 40 mm coarse adjustable

• Resolution : 5 μm±1 μm